UV-CURING SYSTEM U-450 for 450 mm WAFER with FRAME

The POWATEC curing systems are built for wafers with frame up to 450 mm. The LED generates a wavelength of 365 nm with an optical power output of maximum 800 mW.
Open the cover and insert the wafer to the glass pane. Close the lid. The exposure will start immediately. Curing is complete after about 10-60 seconds, yielding a consistent throughput of 50 to 180 wafers/hour. Fully adjustable exposure dose ranges between  80 mJ / cm² to 1000 mJ / cm².

Key features:

  • Low cost in Procurement = Lowest total cost of ownership (COO)!
  • No development of harmful ozone
  • Zero warm-up time
  • Long service life of UV-LEDs (10,000 hrs +)
  • Low intensity drop (5% in 10,000 hours)
  • No thermal influence on the film
  • Compact and robust table design
  • Short installation and implementation time
  • Low maintenance costs
  • Conforms to IEC 204-1 safety standards
  • Productivity 50-180 wafer / hr.

 

Options:

  • Nitrogen Shower

 

 

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